Growth Assisted by Glancing Angle Deposition: A New Technique to Fabricate Highly Porous Anisotropic Thin Films

Glancing Angle Deposition

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Generalized Ellipsometry on Sculptured Thin Films made by Glancing Angle Deposition

ii Acknowledgements iii List of Symbols and Acronyms ix

Control of Nano-Structure of Photocatalytic TiO2 Films by Oxygen Ion Assisted Glancing Angle Deposition

Wafer-scale, three-dimensional helical porous thin films deposited at a glancing angle.

Minimization of helices opens a door to impose novel functions derived from the dimensional shrinkage of optical, mechanical and electronic devices. Glancing angle deposition (GLAD) enables one to deposit three-dimensional helical porous thin films (HPTFs) composed of separated spiral micro/nano-columns. GLAD integrates a series of advantageous features, including one-step deposition, wafer-sca...

Ultrahigh vacuum glancing angle deposition system for thin films with controlled three-dimensional nanoscale structure

An ultrahigh vacuum apparatus for the deposition of thin films with controlled three-dimensional nanometer-scale structure is described. Our system allows an alternate, faster, cheaper way of obtaining nanoscale structured thin films when compared to traditional procedures of patterning and etching. It also allows creation of porous structures that are unattainable with known techniques. The un...